1978-1982年:毕业于哈尔滨工业大学半导体器件专业获学士学位 1984-1988年:毕业于哈尔滨工业大学半导体器件与微电子学专业获硕士学位 1988-1992年:哈尔滨工业大学航天学院讲师 1992-1999年:哈尔滨工业大学航天学院副教授 1999-2003年:哈尔滨工业大学航天学院教授 2003-目前:哈尔滨工业大学航天学院博士生导师 总装微纳米技术专家组成员; 总装军用电子元器件型谱系列专家组成员; 电子学会敏感技术分会力敏专业委员会副主任; 东北微机电系统(MEMS)技术联合体副秘书长; 《传感器技术》编委; 黑龙江省政协委员。
获得奖项:著作及论文:
[1]刘晓为等,硼掺杂多晶硅薄膜电阻率的温度特性,半导体学报,1994,15(6):429-434 [2]LiuXiao-wei,etal,ANewWaterPermeabilitySensorforTestofThinFilms,J.ofMicromech..&Microeng.,1995,5:147-149 [3]刘晓为等,电容式加速度传感器的计算机模拟,压电与声光,2001.10:170~172 [4]LiuXiao-wei,etal.ComputerSimulationofPolysiliconPressureSensors:MinZhang.19985THINTERNATIONALCONFERENCEON SOLID-STATEANDINTEGRATEDCIRCUITTECHNOLOGY.ICSICT’98.BeiJing.1998.IEEE.1998.10. [5]LiuXiao-wei,etal.HighTemperaturePressureandTemperatureMultifunctionSensors:MinZhang.19985THINTERNATIONALCONFERENCEON SOLID-STATEANDINTEGRATEDCIRCUITTECHNOLOGY.ICSICT’98.BeiJing.1998.IEEE.1998.10. [6]LiuXiao-wei,etal.InvestigationofKOHEtchingforImprovingSurfacequality:MinZhang.19985THINTERNATIONALCONFERENCEON SOLID-STATEANDINTEGRATEDCIRCUITTECHNOLOGY.ICSICT’98.BeiJing.1998.IEEE.1998.10. [7]LiuXiao-wei,etal.SimulationofPiezoelectricDrivenDiaphragmsofMicropumps:FOURTHINTERNATIONALCONFERENCEON ELECTRONICMEASUREMENT&INSTRUMENTS.ICEMI’99.Harbin.1999.EMI&HIT.1999.08. [8]LiuXiao-wei,etal,InvestigationofPiezoresistiveEffectofPolysiliconFilmsinHighTemperature:PACIFICRIMWORKSHOPONTRANSDUCERSANDMICRO/NANOTECHNOLOGIES.XiaMen,2002.07. [9]LiuXiao-wei,etal,PolysiliconSOIPressureSensorwithSelf-TestingFunction:PACIFICRIMWORKSHOPONTRANSDUCERSANDMICRO/NANOTECHNOLOGIES.XiaMen,2002.07. [10]LiuXiao-wei,etal,Simulationofbulkmicromachinedvibrationsensorwithlownoise:InternationalSymposiumonMicrotechnology.SPIE.Spain.2003.05.
承担项目: